E08800 - SEMI E88 - Specification for AMHS Storage SEM (Stocker SEM) StdPbc-1017 quartz boats

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SEMI MF1530 — Test Method for Measuring Flatness

This overview Guide provides process development

This Document describes the conditions and procedures for testing the accuracy

E08800 - SEMI E88 - Specification for AMHS Storage SEM (Stocker SEM) StdPbc-1017 quartz boatsThis Standard establishes a Specific Equipment Model (SEM) for AMHS storage equipment (Stocker SEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of Stocker SEM equipment into an automated (e. g., semiconductor fabrication and flat panel display) factory.