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Description

EBD-CDR5050NM W FULL CARBON CD PROBE, 5PK DESCRIPTION TIP SPECIFICATIONS CANTILEVER SPECIFICATIONS The EBD CDR probes for 3D reference and hybrid metrology: witha full range of EBD CDR probes from 130 nm down to 15 nm, this ispushing the limits of 3D AFM technology for measuring tight dimensionsand extending its capability for future nodes. It brings EBDskey strength: precise tip orientation, precise control in tip dimensions(length, total diameter, vertical

preventing moisture from entering the head during fluid scanning

- Individually calibrated spring constant

For an intentionally dull ScanAsyst tip for force measurements and extremely delicate samples in fluid

with SCANASYST-AIR-HPI-SS probes

Standard sample

Platinum-Iridium coated

and a magnetic moment of 1e-13 EMU (medium)

15nm Tip Radius

10e5 enhancement is achievable routinely with the TERS-AFM probes on the TERS-SMPL using Innova-IRIS and tuning fork FM feedback

The imec CAMS resolution qualification structures consist of a thin uniform layer of SiO2 confined between highly-doped grown poly-Si and implanted Si

Highly wear resistant

***Note: Bruker's new MESP-V2 probe replaces the legacy MESP probe

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