E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) Revision:SEMI E54.24-1116 - Superseded SEMI E116-1017 (technical revision)

SEMI E116-1017 (technical revision)

SEMI D6 — Standard Edge Length and Thickness for Flat Panel Display Mask Substrates

carrier management

This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12

E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) Revision:SEMI E54.24-1116 - Superseded SEMI E116-1017 (technical revision)This Standard describes a specific device structure and behavior of a generic equipment networked sensor. This could include a sensor added onto the equipment that communicates over a sensor actuator communication network. It could also include a sensor that is part of the default configuration of the equipment, communicating over a sensor actuator communication network. This Standard is applicable to sensors which are regarded as data producers only.