F10300 - SEMI F103 - Specification for Size Ranges of Stainless Steel Canisters to Contain Liquid Chemicals Revision:SEMI F103-0307 - Inactive 2 This Standard applies to

2  This Standard applies to three-port/four-fastener components (except mass flow controllers and mass flow meters)

ESDによる製品，レチクルおよび装置の損傷を低減する。

SEMI E113-0724 (complete rewrite)

本試験方法は，global Compound Semiconductor Committeeで技術的に承認されている。現版は2005年11月29日，global Audits and Reviews Subcommitteeにて発行が承認された。2006年1月にwww

F10300 - SEMI F103 - Specification for Size Ranges of Stainless Steel Canisters to Contain Liquid Chemicals Revision:SEMI F103-0307 - Inactive 2 This Standard applies toThis standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue