C03900 - SEMI C39 - Specification for Potassium Hydroxide Pellets StdVol-Photovoltaic control the associated costs and

control the associated costs and improve communication between supplier and user

1-0226 (technical revision)

and valves)

本テスト方法の目的は，半導体処理装置の高周波 (RF) 電力供給システムで使用されるRF電源の出力を測定する正確な方法を提供し，SEMI E113をサポートすることである。

C03900 - SEMI C39 - Specification for Potassium Hydroxide Pellets StdVol-Photovoltaic control the associated costs andNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for potassium hydroxide pellets used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown