Sample Holder for RTP furnace - EQ-RTP-ACC-01 Glass Substrates Layers from outside to inside

Layers from outside to inside (material in bracket) Polyamide (JIS Z1714):                           0

O ring for flange cap: Used to seal the hinge type flange of GSL-1100X-11

pls choose from Product Options ) The end of the flange has a barbed needle valve

Polish: two sides EPI polished by CMP technology with minimum sub-surface damage

Sample Holder for RTP furnace - EQ-RTP-ACC-01 Glass Substrates Layers from outside to insideFeatures: readily hold 3" wafer without clamps. Quartz, stability in use under 1200C. Easy to load and unload samples. Please order a 3" Dia AlN or graphite wafer as the bottom plate ( click the pictures below to order )