SVG Silicon Valley Group ASML 879-0317-005 Dose Module Filter & Shutter Spare

SVG Silicon Valley Group ASML 879-0317-005 Dose Module Filter & Shutter SpareSVG Silicon Valley Group ASML 879 0317 005 Dose Module Filter & Shutter Spare Part No: 879 0317 005 This SVG ASML 879 0317 005 Dose Module Filter & Shutter is used untested surplus and is being sold as is. The physical condition is fair, but there are signs of previous use and handling. Sale Details Item Condition: Untested, Sold As Is Estimated Packed Shipping Dimensions: L x W x H = 20. 00" x 16. 00" x 8. 00 @ 20. 00 lbs. Shipping Terms: All

Part No: 4S013-352

5080-193343-11 SPACER TK001-05-012-0 4

Liquid Source Assembly

Part No: HV-40HC657

Inventory # CONF-2031

Output: 24VDC

020-100825-1 BAIND SCREW M4*6 SUS304 30 Assembly Part No: 5085-407862-11 MOTOR(T) ASSY

The unit powers on but is missing the "range selection" knob and the mounting tab is slightly bent (see photos)

B2-21 rev B3

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Inventory # A-10064

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