Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLE Correction of the language used
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Description
Correction of the language used to describe requirements for interpretation of results during a verification dose experiment in the second paragraph in 7
Constructional requirements
a) users with an application independent generic cabling system and an open market for cabling components
by testing with a single specified load applied to the stylus to assess compliance with a particular specification
Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLE Correction of the language usedWhat is this standard about? This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.
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