Hitachi Wafer Alignment Unit with SunX Laser Line Controller FEM-312 EFEM Used Part No: F52-60001 Rev

Part No: F52-60001 Rev

This Entegris FMC2-4 NPT Pipe Straight 1/8" FNPT x 1/4" MNPT Reseller Lot of 21 is new surplus

Inventory # 13400

Inventory # G5416

Hitachi Wafer Alignment Unit with SunX Laser Line Controller FEM-312 EFEM Used Part No: F52-60001 RevHitachi Wafer Alignment Unit with SunX Laser Line Controller FEM 312 EFEM Used Inventory # A 12824 This Hitachi Wafer Alignment Unit with SunX Laser Line Controller FEM 312 EFEM is used working surplus. The physical condition is good, but there are signs of previous use and handling. Specifications Part No: Alignment Unit Configured for 300mm Wafers Removed from a Hitachi FEM 312 EFEM Equipment Front End Module Installed Components Hitachi PCB Part