TEL Tokyo Electron 5087-400487-15 Valve Assembly DEV.SOLUTION2 Lithius Working Part No: 214463

Part No: 214463

Part No: 0020-21707

Part No: 2500000006399 Model No:

Made In Japan This item is new surplus

TEL Tokyo Electron 5087-400487-15 Valve Assembly DEV.SOLUTION2 Lithius Working Part No: 214463TEL Tokyo Electron 5087 400487 15 Valve Assembly DEV. SOLUTION2 Lithius Working Part No: 5087 400487 15 Model No: VALVE ASSY (2NDAMF) DEV. SOLUTION2 Develop Process Station, DEV ASSY Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Parts List CKD Valve Part No: AMF V X1 Assembly Part No: 5087 400487 15 VALVE ASSY(2NDAMF) 5010 201961 12 BASE(AMF) 1 5010 402583 11 COVER 1 5010 403084 11 PLATE 1 5004 100010 11 JOINT