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M07900 - SEMI M79 - 太陽電池用円盤状100 mm鏡面研磨単結晶ゲルマニウムウェーハの仕様 Revision:SEMI M79-0211 - Superseded This Document is also used

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This Document is also used by semiconductor processing equipment suppliers to specify standardized interfaces to pump suppliers

この試験方法は,FPDをアプリケーションとするカラーフィルタのユーザ・サプライヤにより使用される。その使用目的は,製品と開発試作品の品質評価である。

SEMI MF1535-0707 (technical revision)

orgで入手可能となる。初版は2009年11月に発行された。

M07900 - SEMI M79 - 太陽電池用円盤状100 mm鏡面研磨単結晶ゲルマニウムウェーハの仕様 Revision:SEMI M79-0211 - Superseded This Document is also usedglobal Compound Semiconductor Materials Committee20101221global Audits and Reviews Subcommittee20112www. semiviews. org www. semi. org 100 mm Referenced SEMI Standards SEMI M1 Specification for Polished Single Crystal Silicon Wafers SEMI MF26 Test Methods for Determining the Orientation of a Semiconductive Single Crystal SEMI MF43 Test Methods for Resistivity of Semiconductor Materials SEMI MF154 Guide for Identification of Structures and Contaminants

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