M02900 - SEMI M29 - Specification for 300 mm Shipping Box StdPbc-0912
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Description
M02900 - SEMI M29 - Specification for 300 mm Shipping Box StdPbc-0912This specification was technically approved by the global Silicon Wafer Committee and is the direct responsibility of the Japanese Silicon Wafer Committee. Current edition approved by the Japanese Regional Standards Committee on August 8, 2003. Initially available at www. semi. org September 2003; to be published November 2003. Originally published December 1996. This specification defines a container for safe transportation of 300 mm wafers from a
Also covered is a procedure for detecting the presence of p-n junctions in the subsurface region of bulk or epitaxial silicon
routine quality control and incoming/outgoing inspection purposes
This symbol is included to provide for a smooth transition from existing traceability and labeling procedures to the comprehensive
NOTE 1: Although no limits are imposed on extractable contaminants from resin pellets by this Specification
This Test Method is intended as an alternative to SEMI E46
SEMIプロセスケミカルまたはガス仕様のデータに基づいて,定量下限値 (MDL: method detection limit) の決定方法について必要最小限のガイドラインを提示する。
This Terminology Document covers definitions of terms used in relation to semiconductor silicon crystals and wafers
SEMI E88-0307 (technical revision)
SEMI MF671-0312 (technical revision)
With reduced precision
Subordinate Documents:
The technique is capable of measuring the crystallographic direction of flats to a greater precision than the Laue back reflection method
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