E00400 - SEMI E4 - Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) Revision:SEMI E4-0699 (Reapproved 0612) - Superseded

E00400 - SEMI E4 - Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) Revision:SEMI E4-0699 (Reapproved 0612) - SupersededThis Standard provides a means for independent manufacturers to produce equipment and or hosts which can be connected without requiring specific knowledge of each other. The SECS I Standard defines a communication interface suitable for the exchange of messages between semiconductor processing equipment and a host. Semiconductor processing equipment includes equipment intended for wafer manufacturing, wafer processing, process measuring, assembly and

3-1016 (Reapproved 0225)

1 — Specification for SECS-II Protocol for Equipment Performance Tracking (EPT)

and fixed or trapped charge distributed within the oxide

the recombination characteristics must be carefully controlled to obtain the desired device performance

Thermal decomposition temperature (see SEMI G75

本仕様はSEMIセンサ／アクチュエータ・ネットワーク（SAN）スタンダード・グループの一部であり，CC-Linkスタンダードに基づいた独自の通信プロトコルを規定するものである。本ネットワーク通信スタンダード（NCS）は，明らかにSEMI SANおよびCC-Linkスタンダード全部で一つのオープン・スタンダードを完璧にそして明白に定義している。そのスタンダードは半導体製造装置内でネットワーク化されたデバイスに標準仕様として相互運用性を持たせるための業界独自の方法を提供することになる。

SEMI G71-0996 (first published)

SEMI C56-1116 (technical revision)

This Standard applies to only the intermediate container

11-0316 (Reapproved 0721)

この文書は，

The scope of this Guide is limited to providing recommended methods of measurement and guidance for the maximum recommended level of static charge on all facility surfaces including: