E15900 - SEMI E159 - ウェーハの搬送及び，輸送のための多目的キャリア(MAC：Multi Application Carrier)の機械仕様 StdPbc-0418 SEMI M73-1108 (first published)

SEMI M73-1108 (first published)

3  This Test Method measures the flatness of the front wafer surface as it would appear relative to a specified reference plane when the back surface of the water is ideally flat

Specification for Cassettes Used for Horizontal Transport and Storage of Flat Panel Display Substrates

This Document is not intended to describe a measurement procedure

E15900 - SEMI E159 - ウェーハの搬送及び，輸送のための多目的キャリア(MAC：Multi Application Carrier)の機械仕様 StdPbc-0418 SEMI M73-1108 (first published)SEMI SEMI Physical Interfaces & Carriers Global Technical Committee20131223global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org2011620129 SEMI M74450 mm 450 MACMACFOUPFOUPMAC 450mm 450mm 450 mmKCP 3 Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers SEMI E30. 1 Inspection and Review Specific Equipment Model (ISEM) SEMI E144 Provisional Specification for RF Air