F11600 - SEMI F116 - Guide for Drain Segregation for Semiconductor Manufacturing Tools to Support Site Water Reuse Revision:SEMI F116-0821 - Current and shipping documentation

and shipping documentation

The purpose of this Specification is to define standard criteria for the alphanumeric marking of round compound semiconductor wafers

本安全基準包含下列項目：

including light sources

F11600 - SEMI F116 - Guide for Drain Segregation for Semiconductor Manufacturing Tools to Support Site Water Reuse Revision:SEMI F116-0821 - Current and shipping documentationThis Guide provides definitions and recommendations for design of drain segregation to enable water reuse in a semiconductor manufacturing facility. It is intended to establish a common basis for developing design specifications and decisions concerning planning and design of water reuse systems. This Guide also includes implications for the water reclamation and reuse systems configurations. This Guide is recommended to be used by semiconductor