F04900 - SEMI F49 - Guide for Semiconductor Factory Systems Voltage Sag Immunity Revision:SEMI F49-0200 (Reapproved 1108) - Superseded The first purpose of this

The first purpose of this Specification and Guide is to standardize requirements for Grades of hydrogen peroxide used in the semiconductor industry and to document testing procedures that may be used to support those requirements

The assumption of wafer-to-wafer (W2W)

帯電した表面への異物吸着を低減する。

SEMI E6-84 (technical revision)

F04900 - SEMI F49 - Guide for Semiconductor Factory Systems Voltage Sag Immunity Revision:SEMI F49-0200 (Reapproved 1108) - Superseded The first purpose of thisA guide defining a systems approach to power conditioning is needed for semiconductor and flat panel display (FPD) facilities. Semiconductor and FPD factories require high levels of power quality due to the sensitivity of equipment and process controls. Semiconductor and FPD processing equipment are especially vulnerable to voltage sags. The facility electrical system distributes power to process equipment, support equipment, and facility