E03500 - SEMI E35 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment Revision:SEMI E35-0200 - Superseded but with suitable modifications

but with suitable modifications

NOTICE: This Document was balloted and approved for withdrawal in 2012

although reference is made to the more general case of two-dimensional measurements made over a rectangular array of data points

Various organic compounds on wafer surfaces can cause a pseudo increase of the thickness of the native oxide film

E03500 - SEMI E35 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment Revision:SEMI E35-0200 - Superseded but with suitable modificationsThe purpose of this Guide is to provide standard cost of ownership (COO) metrics for evaluating unit production cost effectiveness of manufacturing equipment in the semiconductor and related industries. This Guide establishes a procedure to facilitate an understanding of equipment related costs, including costs related to environmental, health, and safety (EHS) factors, by providing definitions, classifications, algorithms, methods, and example values