E15300 - SEMI E153 - AMHS SEMの仕様（AMHS SEM） Revision:SEMI E153-0310 - Superseded SEMI M64-0915 (Reapproved 0422)

SEMI M64-0915 (Reapproved 0422)

and orientation as the unknown specimen

SEMI C93-0522E (editorial change)

It also provides a uniform reporting procedure for digital roughness data that can facilitate communication between different workers and different laboratories

E15300 - SEMI E153 - AMHS SEMの仕様（AMHS SEM） Revision:SEMI E153-0310 - Superseded SEMI M64-0915 (Reapproved 0422)global Information & Control Committee2010120global Audits and Reviews Subcommittee20102www. semi. org200911 AMHSSEMAMHS SEMSEMI E30AMHS SEMAMHS SEMSEMI E84 11GEMSEMI2SECS IISECSTRANSFERTSSC 11GEMAMHS SEMTSSCTRANSFERGEM Referenced SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS II) SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E37 High Speed SECS Message Services