E02400 - SEMI E24 - Cluster Tool Module Interface: Isolation Valve Interlocks Standard StdPbc-0423 This Specification defines the geometric

This Specification defines the geometric shape

which is biologically and ecologically very hazardous

If epitaxial silicon is used

SEMI PV87-1018 (Reapproved 0124)

E02400 - SEMI E24 - Cluster Tool Module Interface: Isolation Valve Interlocks Standard StdPbc-0423 This Specification defines the geometricThis standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www. semi. org in June 2010. Originally published in 1992; previously published July 2004. NOTICE: This document was balloted and approved for withdrawal in 2010. The purpose of this standard is to prevent any opening or closing of