ADTEC AXR-2000III 2000W RF Plasma Generator Novellus 27-360919-00 Tested Working Inventory # A-13618

Inventory # A-13618

Part No: A10056

Part No: 852-017500-003

JEVSA-YV240B-E

ADTEC AXR-2000III 2000W RF Plasma Generator Novellus 27-360919-00 Tested Working Inventory # A-13618ADTEC AXR 2000III 2000W RF Plasma Generator Novellus 27 360919 00 Tested Working Part No: AXR 2000III Novellus Part No: 27 360919 00 Supplier Part No: 10222301 Input: 3, 200 220VAC, 50 60Hz, 4. 1kVA Output: 2000W @ 13. 56MHz CE Marked Made in Japan This item was tested in our facility and is fully functional. The unit requires a remote interlock to function (not included). The unit can be pinned out with pinouts at 3 10 to activate the interlock