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SiC Webinar December 2022 - On Demand StdTpc-Documentation/Training 1 — Mechanical Specification for

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1 — Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm Wafers

as balloted

1  This Standard partially specifies the FOUPs used to transport and store 300 mm wafers in an IC manufacturing facility

and behavior identified in this Document

SiC Webinar December 2022 - On Demand StdTpc-Documentation/Training 1 — Mechanical Specification for

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